Optimal design and fabrication of MEMs microactuator for recording head (Record no. 83736)

MARC details
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005 - DATE AND TIME OF LATEST TRANSACTION
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008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 060223s2005 th uu|m rtt 0| a1eng d
035 ## - SYSTEM CONTROL NUMBER
System control number .b11981490
099 #9 - LOCAL FREE-TEXT CALL NUMBER (OCLC)
Classification number AIT Thesis no.ME-05-03
100 0# - MAIN ENTRY--PERSONAL NAME
Personal name Puttachat Khuntontong
245 10 - TITLE STATEMENT
Title Optimal design and fabrication of MEMs microactuator for recording head
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Pathum Thani, Thailand :
Name of publisher, distributor, etc. Asian Institute of Technology,
Date of publication, distribution, etc. 2005
300 ## - PHYSICAL DESCRIPTION
Extent 74, [9] p. :
Other physical details ill.
490 1# - SERIES STATEMENT
Series statement Thesis ;
Volume/sequential designation no. ME-05-03
500 ## - GENERAL NOTE
General note A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies
502 ## - DISSERTATION NOTE
Dissertation note Thesis (M.Eng.) - Asian Institute of Technology, 2005
520 ## - SUMMARY, ETC.
Summary, etc. A dual-stage servo system which utilizes a high bandwidth secondary actuator has been proposed for magnetic hard disk drives. Microfabricated actuators are promising candidates for this secondary actuator, since they offer the benefits of extremely small size and weight and may be batch fabricated at low production cost. In this thesis we propose the design of an electrostatic microactuator, which produces sufficient output force to move a conventional slider in a hard disk drive. The slider has typical mass of 1 mg and dimensions of 1200 x 1000 æm in length and width respectively. The actuator is capable of 1 æm displacement at a high frequency more than 20 to IO times of voice coil motor (VCM) 1 kHz. We have designed and fabricated the microactuator with two technologies, PolyMUMPs and SOI. They have two behaviors of motion design. First design is the transverse motion moving in X axis. Second design is the rotational design moving in angular, direction.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microelectromechanical systems
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microactuators
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Electrostatics
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Optimal designs (Statistics)
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Afzulpurkar, Nitin V.,
Relator term Chairperson
700 0# - ADDED ENTRY--PERSONAL NAME
Personal name Adisorn Tuantranont,
Relator term Scholarship donor
700 0# - ADDED ENTRY--PERSONAL NAME
Personal name Chittiporn Pupaichitkul,
Relator term Examination committee
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element National Electronics and Computer Technology Center (NECTEC),
Relator term Scholarship donor
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element National Science and Technology Development Agency (NSTDA),
Relator term Scholarship donor
810 2# - SERIES ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element Asian Institute of Technology.
Title of a work Thesis ;
Volume/sequential designation no. ME-05-03
856 ## - ELECTRONIC LOCATION AND ACCESS
Materials specified Full-Text
Uniform Resource Identifier <a href="http://203.159.5.9/ait-thesis/detail.php?q=B09814">http://203.159.5.9/ait-thesis/detail.php?q=B09814</a>
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998 ## - LOCAL CONTROL INFORMATION (RLIN)
Operator's initials, OID (RLIN) 0
Cataloger's initials, CIN (RLIN) 060210
First date, FD (RLIN) m
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945 ## - LOCAL PROCESSING INFORMATION (OCLC)
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945 ## - LOCAL PROCESSING INFORMATION (OCLC)
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942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type 22-AIT Thesis (Replacement)
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type 40-Archives
909 ## - LOCAL ITEMS USED
Barcode Barcode : 30050120658124
CREATED CREATED : 2014-03-21
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Barcode Barcode : 30050160028295
CREATED CREATED : 2016-03-17
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Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Shelving location Date acquired Cost, normal purchase price Total checkouts Full call number Barcode Date last seen Copy number Price effective from Koha item type
      Available for Loans Asian Institute of Technology Library Asian Institute of Technology Library AIT Publications 18/08/2026 50.00   AIT Thesis no.ME-05-03 30050120658124 18/08/2026 3 18/08/2026 22-AIT Thesis (Replacement)
      Available for Loans Asian Institute of Technology Library Asian Institute of Technology Library Archives 18/08/2026     AIT Thesis no.ME-05-03 30050160028295 18/08/2026 1 18/08/2026 40-Archives
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