@book{118948,
	author = {International Symposium on Technology Evolution for Silicon Nano-Electronics and Miyazaki, Seiichi.},
	title = {Technology evolution for silicon nano-electronics :},
	publisher = {Trans Tech Publications,},
	year = {2011.},
	series = {Key engineering materials,},
	address = {Stafa-Zurich, Switzerland ;},
	url = {https://app.knovel.com/hotlink/toc/id:kpTESNESI1/technology-evolution/technology-evolution}
}