@book{2233,
	author = {Doi, Toshiro K.,},
	title = {Advances in CMP/polishing technologies for the manufacture of electronic devices /},
	publisher = {Elsevier,},
	year = {2012.},
	address = {Oxford :},
	edition = {1st ed.},
	url = {https://app.knovel.com/hotlink/toc/id:kpACMPPTM3/advances-in-cmp-polishing/advances-in-cmp-polishing}
}