02812nas|a2200421 i 4500 20260818090121.0 030919s2003 th uzm rtt 00| a1eng d .b11937439 AIT Thesis no.ME-03-04 Don Klaitabtim Design and fabrication of an electrostatic MEMS microactuator for recording head Pathum Thani, Thailand : Asian Institute of Technology, 2003 50, [14] p. Thesis ; no. ME-03-04 Thesis (M.Eng.) - Asian Institute of Technology, 2003 A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies This thesis presents a design concept for the second stage actuator of higher density hard disk drive (HDD). The actuator is fabricated by a microelectromechanical system (MEMS), known as the electrostatic microactuator. The microactuator can be designed based on electrostatic principles. According to MEMS process, the author has selected an electrostatic design in which the microactuator stays between the slider and the suspension. There are three important design factors: higher displacement accuracy, higher resonant frequency, and low voltage supply. The actuator is designed in physical layout with the folded springs, comb drive and a moving plate. After finishing the design, under the finite element analysis is performed to simulate the resulting resonant frequency in condition of low voltage supply for the specification requirement. Final work is testing and verification to determine the fabricated device performance. Microactuators Design Actuators Afzulpurkar, Nitin V., Chairperson Adisorn Tuantranont, Co-chairperson Lertsak Lekawat, Examination Committee Chumnarn Punyasa, Examination committee Thailand Graduate of Science and Technology (TGIST) National Science, Scholarship Donor Technology Development Agency ( NSTDA), Asian Institute of Technology. Thesis ; no. ME-03-04 Full-Text http://203.159.5.9/ait-thesis/detail.php?q=B08537 .b11937439 mnait u 240422 0 030919 m a u 0 mnait mnarc 22 40 Barcode : 30050120658033 CREATED : 2014-03-21 RECORD # : i12777262 LPATRON : 0 LCHKIN : - # RENEWALS : 0 # OVERDUE : 0 IUSE3 : 1 TOT CHKOUT : 0 TOT RENEW : 0 Barcode : 30050160028212 CREATED : 2016-03-17 RECORD # : i12894928 LPATRON : 0 LCHKIN : - # RENEWALS : 0 # OVERDUE : 0 IUSE3 : 0 TOT CHKOUT : 0 TOT RENEW : 0 26931 26931 0 0 0 0 MAIN MAIN mnait 2026-08-18 50.00 0 AIT Thesis no.ME-03-04 30050120658033 2026-08-18 09:01:21 3 2026-08-18 22 0 0 0 0 MAIN MAIN mnarc 2026-08-18 0 AIT Thesis no.ME-03-04 30050160028212 2026-08-18 09:01:21 1 2026-08-18 40