03118nas a2200421 a 4500 20260818090140.0 090414s2006 th uu|m rtt 0| a1eng d .b12052632 AIT Thesis no.ME-06-06 Kajohn Choobthaisong Design and simulation of microactuator for magnetic recording head Pathum Thani, Thailand : Asian Institute of Technology, 2007 69 p. : ill. Thesis ; no. ME-06-06 A thesis submitted in pa11ial fulfillment of the requ irements for the degree of Master of Engineering, School of Engineering and Technology, School of Engineering and Technology Thesis (M.Eng.) - Asian Institute of Technology, 2006 This thesis discusses the design and simulation of MEMS microactuator for a dual-stage servo system in hard disk drive. The microactuator utilizes parallel-plates actuation and position sensing controller which will be completely batch fabricated at low production cost. The microactuator is mounted between the slider and suspension and drives the slider on which a magnetic head element is attached. The microactuator has an electrical microstructure directly processed from SOl wafer which consist of stator attached to the substrate and a movable rotor connected to the spring beam. In the design, avoidance anchored in the movable stage. The design of electrostatic force actuation generate sufficient out put force to move a conventional slider in hard disk drive. When voltage is applied to the actuator, the microactuator will drive the head to move in tracking direction by the rotational motion of the rotor. The software is used in the simulation is Conventor ware. The microactuator is capable that ± 0.5 11m equivalence displacement of the head element in tracking direction is achieved under the driving voltage 50 V Microactuators Simulation methods Magnetic recorders and recording Heads Afzulpurkar, Nitin V., Chairperson Adisorn Tuantranont, Examination committee Lertsak Lekawat, Examination Committee RTG Fellowship, Scholarship donor National Electronics and Computer Technology Center (NECTEC), Scholarship donor National Science and Technology Development Agency (NSTDA), Scholarship donor Asian Institute of Technology. Thesis ; no. ME-06-06 Full-Text http://203.159.5.9/ait-thesis/detail.php?q=B11056 .b12052632 mnait u 240328 0 090414 m a u 0 mnait mnarc 22 40 Barcode : 30050120657787 CREATED : 2014-03-21 RECORD # : i12777328 LPATRON : 0 LCHKIN : - # RENEWALS : 0 # OVERDUE : 0 IUSE3 : 0 TOT CHKOUT : 0 TOT RENEW : 0 Barcode : 30050160027842 CREATED : 2016-03-17 RECORD # : i12894692 LPATRON : 0 LCHKIN : - # RENEWALS : 0 # OVERDUE : 0 IUSE3 : 0 TOT CHKOUT : 0 TOT RENEW : 0 27033 27033 0 0 0 0 MAIN MAIN mnait 2026-08-18 50.00 0 AIT Thesis no.ME-06-06 30050120657787 2026-08-18 09:01:40 3 2026-08-18 22 0 0 0 0 MAIN MAIN mnarc 2026-08-18 0 AIT Thesis no.ME-06-06 30050160027842 2026-08-18 09:01:40 1 2026-08-18 40