00247nam a2200097 a 450000500170000000800410001703500150005810000260007324500370009971000130013620260818155058.0110215s2009    th ad  |||    000 0 eng d  a.b121472911 aAfzulpurkar, Nitin V.10aMicro-electro mechanical systems2 aMEC/NANO