02292nas|a2200289 a 450000500170000000800410001703500150005810000260007324500760009926000670017530000230024249000270026550001390029250200580043152009770048965000350146665000190150165000190152065000330153970000400157270000440161270000530165671000850170971000840179481000590187885600650193720260818170726.0060223s2005    th uu|m rtt   0|  a1eng d  a.b119814900 aPuttachat Khuntontong10aOptimal design and fabrication of MEMs microactuator for recording head  aPathum Thani, Thailand :bAsian Institute of Technology,c2005  a74, [9] p. :bill.1 aThesis ;vno. ME-05-03  aA thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies  aThesis (M.Eng.) - Asian Institute of Technology, 2005  aA dual-stage servo system which utilizes a high bandwidth secondary actuator has been proposed for magnetic hard disk drives. Microfabricated actuators are promising candidates for this secondary actuator, since they offer the benefits of extremely small size and weight and may be batch fabricated at low production cost. In this thesis we propose the design of an electrostatic microactuator, which produces sufficient output force to move a conventional slider in a hard disk drive. The slider has typical mass of 1 mg and dimensions of 1200 x 1000 æm in length and width respectively. The actuator is capable of 1 æm displacement at a high frequency more than 20 to IO times of voice coil motor (VCM) 1 kHz. We have designed and fabricated the microactuator with two technologies, PolyMUMPs and SOI. They have two behaviors of motion design. First design is the transverse motion moving in X axis. Second design is the rotational design moving in angular, direction. 0aMicroelectromechanical systems 0aMicroactuators 0aElectrostatics 0aOptimal designs (Statistics)1 aAfzulpurkar, Nitin V.,eChairperson0 aAdisorn Tuantranont,eScholarship donor0 aChittiporn Pupaichitkul,eExamination committee 2 aNational Electronics and Computer Technology Center (NECTEC),eScholarship donor2 aNational Science and Technology Development Agency (NSTDA),eScholarship donor 2 aAsian Institute of Technology.tThesis ;vno. ME-05-03  3Full-Textuhttp://203.159.5.9/ait-thesis/detail.php?q=B09814