02928nas|a2200433 a 4500 20260818170726.0 060223s2005 th uu|m rtt 0| a1eng d .b11981490 AIT Thesis no.ME-05-03 Puttachat Khuntontong Optimal design and fabrication of MEMs microactuator for recording head Pathum Thani, Thailand : Asian Institute of Technology, 2005 74, [9] p. : ill. Thesis ; no. ME-05-03 A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies Thesis (M.Eng.) - Asian Institute of Technology, 2005 A dual-stage servo system which utilizes a high bandwidth secondary actuator has been proposed for magnetic hard disk drives. Microfabricated actuators are promising candidates for this secondary actuator, since they offer the benefits of extremely small size and weight and may be batch fabricated at low production cost. In this thesis we propose the design of an electrostatic microactuator, which produces sufficient output force to move a conventional slider in a hard disk drive. The slider has typical mass of 1 mg and dimensions of 1200 x 1000 æm in length and width respectively. The actuator is capable of 1 æm displacement at a high frequency more than 20 to IO times of voice coil motor (VCM) 1 kHz. We have designed and fabricated the microactuator with two technologies, PolyMUMPs and SOI. They have two behaviors of motion design. First design is the transverse motion moving in X axis. Second design is the rotational design moving in angular, direction. Microelectromechanical systems Microactuators Electrostatics Optimal designs (Statistics) Afzulpurkar, Nitin V., Chairperson Adisorn Tuantranont, Scholarship donor Chittiporn Pupaichitkul, Examination committee National Electronics and Computer Technology Center (NECTEC), Scholarship donor National Science and Technology Development Agency (NSTDA), Scholarship donor Asian Institute of Technology. Thesis ; no. ME-05-03 Full-Text http://203.159.5.9/ait-thesis/detail.php?q=B09814 .b11981490 mnait u 240405 0 060210 m a u 0 mnait mnarc 22 40 Barcode : 30050120658124 CREATED : 2014-03-21 RECORD # : i12777511 LPATRON : 0 LCHKIN : - # RENEWALS : 0 # OVERDUE : 0 IUSE3 : 0 TOT CHKOUT : 0 TOT RENEW : 0 Barcode : 30050160028295 CREATED : 2016-03-17 RECORD # : i12894849 LPATRON : 0 LCHKIN : - # RENEWALS : 0 # OVERDUE : 0 IUSE3 : 0 TOT CHKOUT : 0 TOT RENEW : 0 83736 83736 0 0 0 0 MAIN MAIN mnait 2026-08-18 50.00 0 AIT Thesis no.ME-05-03 30050120658124 2026-08-18 17:07:26 3 2026-08-18 22 0 0 0 0 MAIN MAIN mnarc 2026-08-18 0 AIT Thesis no.ME-05-03 30050160028295 2026-08-18 17:07:26 1 2026-08-18 40