Puttachat Khuntontong creator Afzulpurkar, Nitin V. Chairperson Adisorn Tuantranont Scholarship donor Chittiporn Pupaichitkul Examination committee National Electronics and Computer Technology Center (NECTEC) Scholarship donor National Science and Technology Development Agency (NSTDA) Scholarship donor text series technical report th Pathum Thani, Thailand Asian Institute of Technology 2005 continuing eng 74, [9] p. : ill. A dual-stage servo system which utilizes a high bandwidth secondary actuator has been proposed for magnetic hard disk drives. Microfabricated actuators are promising candidates for this secondary actuator, since they offer the benefits of extremely small size and weight and may be batch fabricated at low production cost. In this thesis we propose the design of an electrostatic microactuator, which produces sufficient output force to move a conventional slider in a hard disk drive. The slider has typical mass of 1 mg and dimensions of 1200 x 1000 æm in length and width respectively. The actuator is capable of 1 æm displacement at a high frequency more than 20 to IO times of voice coil motor (VCM) 1 kHz. We have designed and fabricated the microactuator with two technologies, PolyMUMPs and SOI. They have two behaviors of motion design. First design is the transverse motion moving in X axis. Second design is the rotational design moving in angular, direction. A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies Thesis (M.Eng.) - Asian Institute of Technology, 2005 Microelectromechanical systems Microactuators Electrostatics Optimal designs (Statistics) Asian Institute of Technology. http://203.159.5.9/ait-thesis/detail.php?q=B09814 http://203.159.5.9/ait-thesis/detail.php?q=B09814 060223 20260818170726.0