| 000 | 02812nas|a2200421 i 4500 | ||
|---|---|---|---|
| 005 | 20260818090121.0 | ||
| 008 | 030919s2003 th uzm rtt 00| a1eng d | ||
| 035 | _a.b11937439 | ||
| 099 | 9 | _aAIT Thesis no.ME-03-04 | |
| 100 | 0 | _aDon Klaitabtim | |
| 245 | 1 | 0 | _aDesign and fabrication of an electrostatic MEMS microactuator for recording head |
| 260 |
_aPathum Thani, Thailand : _bAsian Institute of Technology, _c2003 |
||
| 300 | _a50, [14] p. | ||
| 490 | 1 |
_aThesis ; _vno. ME-03-04 |
|
| 502 | _aThesis (M.Eng.) - Asian Institute of Technology, 2003 | ||
| 500 | _aA thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies | ||
| 520 | _aThis thesis presents a design concept for the second stage actuator of higher density hard disk drive (HDD). The actuator is fabricated by a microelectromechanical system (MEMS), known as the electrostatic microactuator. The microactuator can be designed based on electrostatic principles. According to MEMS process, the author has selected an electrostatic design in which the microactuator stays between the slider and the suspension. There are three important design factors: higher displacement accuracy, higher resonant frequency, and low voltage supply. The actuator is designed in physical layout with the folded springs, comb drive and a moving plate. After finishing the design, under the finite element analysis is performed to simulate the resulting resonant frequency in condition of low voltage supply for the specification requirement. Final work is testing and verification to determine the fabricated device performance. | ||
| 650 | 0 |
_aMicroactuators _xDesign |
|
| 650 | 0 | _aActuators | |
| 700 | 1 |
_aAfzulpurkar, Nitin V., _eChairperson |
|
| 700 | 0 |
_aAdisorn Tuantranont, _eCo-chairperson |
|
| 700 | 0 |
_aLertsak Lekawat, _eExamination Committee |
|
| 710 | 2 |
_aChumnarn Punyasa, _eExamination committee |
|
| 710 | 2 |
_aThailand Graduate of Science and Technology (TGIST) National Science, _eScholarship Donor |
|
| 710 | 2 | _aTechnology Development Agency ( NSTDA), | |
| 810 | 2 |
_aAsian Institute of Technology. _tThesis ; _vno. ME-03-04 |
|
| 856 |
_3Full-Text _u http://203.159.5.9/ait-thesis/detail.php?q=B08537 |
||
| 907 |
_a.b11937439 _bmnait _cu |
||
| 902 | _a240422 | ||
| 998 |
_b0 _c030919 _dm _ea _fu _g0 |
||
| 945 | _lmnait | ||
| 945 | _lmnarc | ||
| 942 | _c22 | ||
| 942 | _c40 | ||
| 909 |
_aBarcode : 30050120658033 _bCREATED : 2014-03-21 _cRECORD # : i12777262 _dLPATRON : 0 _eLCHKIN : - _f# RENEWALS : 0 _g# OVERDUE : 0 _hIUSE3 : 1 _iTOT CHKOUT : 0 _jTOT RENEW : 0 |
||
| 909 |
_aBarcode : 30050160028212 _bCREATED : 2016-03-17 _cRECORD # : i12894928 _dLPATRON : 0 _eLCHKIN : - _f# RENEWALS : 0 _g# OVERDUE : 0 _hIUSE3 : 0 _iTOT CHKOUT : 0 _jTOT RENEW : 0 |
||
| 999 |
_c26931 _d26931 |
||