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005			20260818090140.0
008			090414s2006 th uu|m rtt 0| a1eng d
035			_a.b12052632
099		9	_aAIT Thesis no.ME-06-06
100	0		_aKajohn Choobthaisong
245	1	0	_aDesign and simulation of microactuator for magnetic recording head
260			_aPathum Thani, Thailand : _bAsian Institute of Technology, _c2007
300			_a69 p. : _bill.
490	1		_aThesis ; _vno. ME-06-06
500			_aA thesis submitted in pa11ial fulfillment of the requ irements for the degree of Master of Engineering, School of Engineering and Technology, School of Engineering and Technology
502			_aThesis (M.Eng.) - Asian Institute of Technology, 2006
520			_aThis thesis discusses the design and simulation of MEMS microactuator for a dual-stage servo system in hard disk drive. The microactuator utilizes parallel-plates actuation and position sensing controller which will be completely batch fabricated at low production cost. The microactuator is mounted between the slider and suspension and drives the slider on which a magnetic head element is attached. The microactuator has an electrical microstructure directly processed from SOl wafer which consist of stator attached to the substrate and a movable rotor connected to the spring beam. In the design, avoidance anchored in the movable stage. The design of electrostatic force actuation generate sufficient out put force to move a conventional slider in hard disk drive. When voltage is applied to the actuator, the microactuator will drive the head to move in tracking direction by the rotational motion of the rotor. The software is used in the simulation is Conventor ware. The microactuator is capable that ± 0.5 11m equivalence displacement of the head element in tracking direction is achieved under the driving voltage 50 V
650		0	_aMicroactuators _xSimulation methods
650		0	_aMagnetic recorders and recording _xHeads
700	1		_aAfzulpurkar, Nitin V., _eChairperson
700	0		_aAdisorn Tuantranont, _eExamination committee
700	0		_aLertsak Lekawat, _eExamination Committee
710	2		_aRTG Fellowship, _eScholarship donor
710	2		_aNational Electronics and Computer Technology Center (NECTEC), _eScholarship donor
710	2		_aNational Science and Technology Development Agency (NSTDA), _eScholarship donor
810	2		_aAsian Institute of Technology. _tThesis ; _vno. ME-06-06
856			_3Full-Text _uhttp://203.159.5.9/ait-thesis/detail.php?q=B11056
907			_a.b12052632 _bmnait _cu
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