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008 110215s2009 th ad ||| 000 0 eng d
035 _a.b12147291
099 9 _aExam. AT81.07
100 1 _aAfzulpurkar, Nitin V.
245 1 0 _aMicro-electro mechanical systems
710 2 _aMEC/NANO
907 _a.b12147291
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