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035 _a.b11981490
099 9 _aAIT Thesis no.ME-05-03
100 0 _aPuttachat Khuntontong
245 1 0 _aOptimal design and fabrication of MEMs microactuator for recording head
260 _aPathum Thani, Thailand :
_bAsian Institute of Technology,
_c2005
300 _a74, [9] p. :
_bill.
490 1 _aThesis ;
_vno. ME-05-03
500 _aA thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies
502 _aThesis (M.Eng.) - Asian Institute of Technology, 2005
520 _aA dual-stage servo system which utilizes a high bandwidth secondary actuator has been proposed for magnetic hard disk drives. Microfabricated actuators are promising candidates for this secondary actuator, since they offer the benefits of extremely small size and weight and may be batch fabricated at low production cost. In this thesis we propose the design of an electrostatic microactuator, which produces sufficient output force to move a conventional slider in a hard disk drive. The slider has typical mass of 1 mg and dimensions of 1200 x 1000 æm in length and width respectively. The actuator is capable of 1 æm displacement at a high frequency more than 20 to IO times of voice coil motor (VCM) 1 kHz. We have designed and fabricated the microactuator with two technologies, PolyMUMPs and SOI. They have two behaviors of motion design. First design is the transverse motion moving in X axis. Second design is the rotational design moving in angular, direction.
650 0 _aMicroelectromechanical systems
650 0 _aMicroactuators
650 0 _aElectrostatics
650 0 _aOptimal designs (Statistics)
700 1 _aAfzulpurkar, Nitin V.,
_eChairperson
700 0 _aAdisorn Tuantranont,
_eScholarship donor
700 0 _aChittiporn Pupaichitkul,
_eExamination committee
710 2 _aNational Electronics and Computer Technology Center (NECTEC),
_eScholarship donor
710 2 _aNational Science and Technology Development Agency (NSTDA),
_eScholarship donor
810 2 _aAsian Institute of Technology.
_tThesis ;
_vno. ME-05-03
856 _3Full-Text
_uhttp://203.159.5.9/ait-thesis/detail.php?q=B09814
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