AI SearchDesign and fabrication of an electrostatic MEMS microactuator for recording head (Record no. 26931)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02812nas|a2200421 i 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20260818090121.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 030919s2003 th uzm rtt 00| a1eng d |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | .b11937439 |
| 099 #9 - LOCAL FREE-TEXT CALL NUMBER (OCLC) | |
| Classification number | AIT Thesis no.ME-03-04 |
| 100 0# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Don Klaitabtim |
| 245 10 - TITLE STATEMENT | |
| Title | Design and fabrication of an electrostatic MEMS microactuator for recording head |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Pathum Thani, Thailand : |
| Name of publisher, distributor, etc. | Asian Institute of Technology, |
| Date of publication, distribution, etc. | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 50, [14] p. |
| 490 1# - SERIES STATEMENT | |
| Series statement | Thesis ; |
| Volume/sequential designation | no. ME-03-04 |
| 502 ## - DISSERTATION NOTE | |
| Dissertation note | Thesis (M.Eng.) - Asian Institute of Technology, 2003 |
| 500 ## - GENERAL NOTE | |
| General note | A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc. | This thesis presents a design concept for the second stage actuator of higher density hard disk drive (HDD). The actuator is fabricated by a microelectromechanical system (MEMS), known as the electrostatic microactuator. The microactuator can be designed based on electrostatic principles. According to MEMS process, the author has selected an electrostatic design in which the microactuator stays between the slider and the suspension. There are three important design factors: higher displacement accuracy, higher resonant frequency, and low voltage supply. The actuator is designed in physical layout with the folded springs, comb drive and a moving plate. After finishing the design, under the finite element analysis is performed to simulate the resulting resonant frequency in condition of low voltage supply for the specification requirement. Final work is testing and verification to determine the fabricated device performance. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microactuators |
| General subdivision | Design |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Actuators |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Afzulpurkar, Nitin V., |
| Relator term | Chairperson |
| 700 0# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Adisorn Tuantranont, |
| Relator term | Co-chairperson |
| 700 0# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lertsak Lekawat, |
| Relator term | Examination Committee |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Chumnarn Punyasa, |
| Relator term | Examination committee |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Thailand Graduate of Science and Technology (TGIST) National Science, |
| Relator term | Scholarship Donor |
| 710 2# - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Technology Development Agency ( NSTDA), |
| 810 2# - SERIES ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Asian Institute of Technology. |
| Title of a work | Thesis ; |
| Volume/sequential designation | no. ME-03-04 |
| 856 ## - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | Full-Text |
| Uniform Resource Identifier | <a href=" http://203.159.5.9/ait-thesis/detail.php?q=B08537"> http://203.159.5.9/ait-thesis/detail.php?q=B08537</a> |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b11937439 |
| b | mnait |
| c | u |
| 902 ## - LOCAL DATA ELEMENT B, LDB (RLIN) | |
| a | 240422 |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| Operator's initials, OID (RLIN) | 0 |
| Cataloger's initials, CIN (RLIN) | 030919 |
| First date, FD (RLIN) | m |
| -- | a |
| -- | u |
| -- | 0 |
| 945 ## - LOCAL PROCESSING INFORMATION (OCLC) | |
| l | mnait |
| 945 ## - LOCAL PROCESSING INFORMATION (OCLC) | |
| l | mnarc |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | 22-AIT Thesis (Replacement) |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | 40-Archives |
| 909 ## - LOCAL ITEMS USED | |
| Barcode | Barcode : 30050120658033 |
| CREATED | CREATED : 2014-03-21 |
| RECORD Id | RECORD # : i12777262 |
| LPATRON | LPATRON : 0 |
| LCHKIN | LCHKIN : - |
| RENEWALS | # RENEWALS : 0 |
| -- | # OVERDUE : 0 |
| -- | IUSE3 : 1 |
| -- | TOT CHKOUT : 0 |
| -- | TOT RENEW : 0 |
| 909 ## - LOCAL ITEMS USED | |
| Barcode | Barcode : 30050160028212 |
| CREATED | CREATED : 2016-03-17 |
| RECORD Id | RECORD # : i12894928 |
| LPATRON | LPATRON : 0 |
| LCHKIN | LCHKIN : - |
| RENEWALS | # RENEWALS : 0 |
| -- | # OVERDUE : 0 |
| -- | IUSE3 : 0 |
| -- | TOT CHKOUT : 0 |
| -- | TOT RENEW : 0 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Cost, normal purchase price | Total checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Available for Loans | Asian Institute of Technology Library | Asian Institute of Technology Library | AIT Publications | 18/08/2026 | 50.00 | AIT Thesis no.ME-03-04 | 30050120658033 | 18/08/2026 | 3 | 18/08/2026 | 22-AIT Thesis (Replacement) | ||||
| Available for Loans | Asian Institute of Technology Library | Asian Institute of Technology Library | Archives | 18/08/2026 | AIT Thesis no.ME-03-04 | 30050160028212 | 18/08/2026 | 1 | 18/08/2026 | 40-Archives |