AI SearchDesign and fabrication of an electrostatic MEMS microactuator for recording head
Call Number: AIT Thesis no.ME-03-04 Material type:
SeriesSeries: Asian Institute of Technology. Thesis ; no. ME-03-04Publication details: Pathum Thani, Thailand : Asian Institute of Technology, 2003Description: 50, [14] pSubject(s): Online resources: Dissertation note: Thesis (M.Eng.) - Asian Institute of Technology, 2003 Summary: This thesis presents a design concept for the second stage actuator of higher density hard disk drive (HDD). The actuator is fabricated by a microelectromechanical system (MEMS), known as the electrostatic microactuator. The microactuator can be designed based on electrostatic principles. According to MEMS process, the author has selected an electrostatic design in which the microactuator stays between the slider and the suspension. There are three important design factors: higher displacement accuracy, higher resonant frequency, and low voltage supply. The actuator is designed in physical layout with the folded springs, comb drive and a moving plate. After finishing the design, under the finite element analysis is performed to simulate the resulting resonant frequency in condition of low voltage supply for the specification requirement. Final work is testing and verification to determine the fabricated device performance.
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Thesis (M.Eng.) - Asian Institute of Technology, 2003
A thesis submitted in partial fulfillment of the requirements for the degree of Master of Engineering, School of Advanced Technologies
This thesis presents a design concept for the second stage actuator of higher density hard disk drive (HDD). The actuator is fabricated by a microelectromechanical system (MEMS), known as the electrostatic microactuator. The microactuator can be designed based on electrostatic principles. According to MEMS process, the author has selected an electrostatic design in which the microactuator stays between the slider and the suspension. There are three important design factors: higher displacement accuracy, higher resonant frequency, and low voltage supply. The actuator is designed in physical layout with the folded springs, comb drive and a moving plate. After finishing the design, under the finite element analysis is performed to simulate the resulting resonant frequency in condition of low voltage supply for the specification requirement. Final work is testing and verification to determine the fabricated device performance.
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